Capacitive Instrumentation and Sensor Fusion for High-Bandwidth Nanopositioning
- Creator: Moore, Steven I. , Fleming, Andrew J. , Yong, Yuen Kuan
- Resource Type: journal article
- Date: 2019
A method for reducing piezoelectric non-linearity in scanning probe microscope images
- Creator: Fleming, Andrew J.
- Resource Type: conference paper
- Date: 2011
A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor
- Creator: Ji, Lujun , Zhu, Yong , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
- Resource Type: conference paper
- Date: 2010